Bits&Chips number 9 - 2016 covers fifteen years of EUV development by ASML. With in-depth information on the EUV technology (past and present), interviews with ASML-scientist Fred Bijkerk, senior vice president technology at ASML Jos Benschop, ASML's CTO Martin van den Brink and descriptions of the important technical contributions to EUV by Dutch business partners of ASML, including TNO, NTS and VDL ETG.

88 full-color pages, including soft cover